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Überwachung von Waferproduktionsmaschinen

Aufgabe

Um die Qualität der Wafer in puncto Reinheit, Rauheit und Ebenheit zu sichern und den Ausschuss zu reduzieren, sollen von jeder Maschine Messdaten erfasst, über Modbus TCP/IP an eine zentrale Datenbank übermittelt und dort zu Statistikzwecken abgelegt werden.

Lösung

In einer Wafer-Produktionsstätte mit über 500 Maschinen werden pro Maschine je 20 Messpunkte eingerichtet. Verschiedene Messdaten wie Temperatur oder Druck werden damit erfasst. Die Sensoren werden direkt an die Messsysteme angeschlossen. Zwei Ethernet-Systeme erfassen die Sensordaten: das Analogeingabesystem MSX-E3011 und das System für serielle Schnittstellen MSX-E7511. Anschließend werden die Messdaten via Modbus TCP/IP direkt an die maestria®-Datenbank übertragen.

Verwendete Produkte:

Überwachung von Waferproduktionsmaschinen

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3.10.0-1160		CentOS 8
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