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Surveillance de machines pour la production de wafers

Missions

Afin d'obtenir la meilleure qualité de plaquettes en termes de pureté, de rugosité et de planéité et de réduire les rejets, les données doivent être acquises par chaque machine, puis transférées par Modbus TCP/IP à une banque de données centrale où elles seront stockées à des fins statistiques.

Solution

Dans une installation de production de wafers comptant plus de 500 machines, 20 points de mesure par machine sont mis en place. Il s'agit d'acquérir des données de mesure telles que la température et la pression. Les capteurs sont connectés directement aux systèmes de mesure. Deux systèmes Ethernet acquièrent les données des capteurs : le système d'entrée analogique MSX-E3011 et le système pour interfaces série MSX-E7511. Ensuite, les données de mesure sont transférées par Modbus TCP/IP à une banque de données Maestria®.

Produits utilisés :

Surveillance de machines pour la production de wafers

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